Optical nano surface profilometer
This system uses white light interferometry technology to obtain a topographic image of surfaces. A white light interferometer consists of a white light source, an optical system, and a CCD sensor. The data recorded using a high-speed/accuracy 3D moving stage is analyzed by standard software such as “Gwyddion”. This system can offer a precision of 5nm with a scan window size of 1mm×1.2mm and 10mm height displacement, as well as a high-speed scan rate, and is suitable for soft and hard samples in various sizes and shapes. The stage can also be customized to a mosaic-like extra-large window size (centimeter scale) based on customer request.
Note: Based on this method, the measurement range varies from 5 nanometers to a few millimeters. Accuracy and precision depend on source light coherence, vertical stage accuracy, vibration of the table, specimen reflection, roughness, and CCD sensor error. Considering the abovementioned factors, Achievable accuracy is 5 nanometers.
The instrument is ready to sell and/or give services. We can also provide a sample test before you buy.







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